System for fabricating micro optical elements

Details System for fabricating micro optical elements System for fabricating micro optical elements

1991-02-25

1992-09-15

Hannaher, Constantine

Optical: systems and elements

Lens

359900, G03C 500

Patent

active

051483190

ABSTRACT:
A system for fabricating optical elements includes a source of optical radiation that provides an optical beam, the system includes an intensity controller in the path of the beam. The intensity controlled beam is directed toward a substrate disposed on a stage. The stage is adopted to be controllably translated in accordance with an optical intensity map.

REFERENCES:
patent: 3547074 (1970-12-01), Hirschfeld
patent: 3775110 (1973-11-01), Bestenreiner et al.
patent: 4737447 (1988-04-01), Suzuki et al.
patent: 4778747 (1988-10-01), Ohta et al.
patent: 4861140 (1989-08-01), Lucitte et al.
patent: 4911733 (1990-03-01), Matsumoto et al.
M. T. Gale & K. Knop, The Fabrication of Fine Lens Arrays by Laser Beam Writing, Proc. SPIE, vol. 398, pp. 347-353, 1983.

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