Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-07-05
2011-07-05
Shechtman, Sean P (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S051000, C700S108000, C706S013000, C702S179000
Reexamination Certificate
active
07974728
ABSTRACT:
A system, method, and computer readable medium for extracting a key process parameter correlative to a selected device parameter are provided. In an embodiment, the key process parameter is determined using a gene map analysis. The gene map analysis includes grouping highly correlative process parameter and determining the correlation of a group to the selected device parameter. In an embodiment, the groups having greatest correlation to the selected device parameter are displayed in a correlation matrix and/or a gene map.
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Ko Francis
Lin Chun-Hsien
Lo Henry
Wang Jean
Zuo Kewei
Haynes and Boone LLP
Shechtman Sean P
Taiwan Semiconductor Manufacturing Company , Ltd.
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