System for exchanging samples and electrode tip units in a surfa

Details System for exchanging samples and electrode tip units in a surfa System for exchanging samples and electrode tip units in a surfa

1991-08-08

1992-10-20

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 3726

Patent

active

051572567

ABSTRACT:
A surface probe microscope such as a scanning tunneling microscope has a platform on which an actuator and a sample (specimen) holder are disposed in proximity to each other; the actuator being adapted to move a electrode tip into surface probing relationship with the specimen. Holders for retaining samples at storage stations and a carrier for retaining a plurality of electrode tip units are supported on opposite sides of a region in which a laterally extending portion of a longitudinally and rotationally movable arm is disposed. The lateral arm portion has, on one side thereof, a member for engaging an electrode tip unit in the actuator and moving it to the carrier for location in a receptacle therein. Rotation of the arm also indexes the carrier to present different tip units for engagement so that tip units can be exchanged between the actuator and the carrier. On the opposite side of the carrier are the holders for sample retainers. The lateral portion of the arm has pins and detents for engaging the retainers and moving them between the storage stations and the sample holder in proximity to the actuator for the electrode tip.

REFERENCES:
patent: 4874979 (1989-10-01), Rapp
patent: 4908519 (1990-03-01), Park
patent: 4992660 (1991-02-01), Kobayashi

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