Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2007-11-09
2011-12-20
Jarrett, Ryan (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C700S282000, C137S048000
Reexamination Certificate
active
08082066
ABSTRACT:
Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
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Laverdiere Marc
McLoughlin Robert F
Entegris, Inc.
Jarrett Ryan
Sprinkle IP Law Group
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