System for controlling the diameter of a crystal in a crystal gr

Details System for controlling the diameter of a crystal in a crystal gr System for controlling the diameter of a crystal in a crystal gr

1986-05-19

1987-12-01

Doll, John

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156617SP, C30B 1526, C30B 1530

Patent

active

047102586

ABSTRACT:
A crystal growing furnace has lift and rotation control apparatus for both a growing crystal and a crucible containing a melt. A transducer and a servo motor are disposed above the furnace having respective shafts connected along a common horizontal axis on opposite sides of a longitudinal light tube wherein the light tube and transducer shaft can be axially positioned by the shaft of the servo motor. The light tube has a lens for focusing at times on a spot on a meniscus in the furnace and at times on the melt, a light sense detector is connected to the light tube for at times generating a servo motor control error signal to drive the servo motor incrementally to an angular position corresponding to growth in the diameter of the meniscus by tracking a spot on the meniscus. The transducer generates an output signal indicative of incremental angular movement in response to growing the crystal for governing the lift and rotation control apparatus.

REFERENCES:
patent: 3692499 (1972-09-01), Andrychuk
patent: 3740563 (1973-06-01), Reichard
patent: 3998598 (1976-12-01), Bonora
patent: 4350557 (1982-09-01), Scholl et al.
Hull et al., "Monitoring Diameter of Semiconductor Crystals During Automated Growth", IBM Technical Disclosure Bulletin, vol. 19, No. 3, pp. 869-870, 8/76.

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