Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2008-01-08
2008-01-08
Jarrett, Ryan A (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C700S283000, C137S048000
Reexamination Certificate
active
11502048
ABSTRACT:
Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
REFERENCES:
patent: 5964192 (1999-10-01), Ishii
patent: 6113695 (2000-09-01), Fujimoto
patent: 6176438 (2001-01-01), Sato et al.
patent: 6200100 (2001-03-01), Yang et al.
patent: 6348098 (2002-02-01), McLoughlin et al.
patent: 6973375 (2005-12-01), Brodeur et al.
patent: 2001/0035512 (2001-11-01), Messer et al.
patent: 2002/0139949 (2002-10-01), Quarre
International Search Report for PCT/US05/03709, Nov. 20, 2006.
Laverdiere Marc
McLoughlin Robert F.
Entegris, Inc.
Jarrett Ryan A
Sprinkle IP Law Group
LandOfFree
System for controlling fluid flow based on a valve break point does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System for controlling fluid flow based on a valve break point, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for controlling fluid flow based on a valve break point will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3938586