System for controlling fluid flow

Details System for controlling fluid flow System for controlling fluid flow

2006-09-12

2006-09-12

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Mechanical control system

C137S048000

Reexamination Certificate

active

07107128

ABSTRACT:
Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.

REFERENCES:
patent: 5964192 (1999-10-01), Ishii
patent: 6113695 (2000-09-01), Fujimoto
patent: 6176438 (2001-01-01), Sato et al.
patent: 6200100 (2001-03-01), Yang et al.
patent: 6348098 (2002-02-01), McLoughlin et al.
patent: 2001/0035512 (2001-11-01), Messer et al.
patent: 2002/0139949 (2002-10-01), Quarre

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