System for checking gas pressure and gas leakage

Details System for checking gas pressure and gas leakage System for checking gas pressure and gas leakage

1997-07-08

2000-04-18

Wu, Daniel J.

Communications: electrical

Condition responsive indicating system

Specific condition

340611, 340626, 73 405R, G08B 2100

Patent

active

060520574

ABSTRACT:
A system is disclosed for checking gas pressure and gas leakage in one or more gas cylinders. The system particularly detects the state of gas pressure in a gas cylinder during ion-implantation, monitors for the existence of any gas leaks in the gas cylinders, and informs the manufacture process manager of the results of checking and monitoring using a communications device. This minimizes any loss of time due to equipment stoppage and protecting workers from any poisonous gas leaks. This improved system includes one or more gas checking units for checking gas pressure in one or more gas cylinders and detecting gas leaks from the one or more gas cylinders; a signal processor for processing information received from the one or more gas checking units and converting the information into a signal format suitable for transmission; a transmitting unit for transmitting the converted signal received from the signal processor along a communications line; and a display for displaying information based on the transmitted signal.

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