System for and method of manufacturing a large-area...

Details System for and method of manufacturing a large-area... System for and method of manufacturing a large-area...

2006-11-07

2006-11-07

Whitehead, Jr., Carl (Department: 2813)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C118S719000, C118S729000, C427S069000, C438S907000, C438S908000

Reexamination Certificate

active

07132016

ABSTRACT:
A vapor deposition shadow mask system includes a number of series connected vacuum vessels each having a material deposition source and shadow mask positioned therein. A substrate is translated along a path that has a longitudinal axis that extends through the vacuum vessels. Centers of shadow masks in first and second vacuum vessels are offset laterally on opposite sides of the longitudinal axis. The system is operative for depositing material on a second area of the substrate via the material deposition source and shadow mask in the second vacuum vessel in a manner that overlaps a portion of the material deposited on a first, adjacent area of the substrate via the material deposition source and shadow mask in the first vacuum vessel.

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U.S. Appl. No. 60/386,525 (Brody et al.), filed Jun. 5, 2002.

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