System for acquiring and analyzing a two-dimensional array of da

Details System for acquiring and analyzing a two-dimensional array of da System for acquiring and analyzing a two-dimensional array of da

1996-03-22

1999-05-25

Barlow, John

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

702 31, 364146, 364188, 20429832, G06F 1700, H01L 2166

Patent

active

059078200

ABSTRACT:
A system for acquiring and displaying which represents a two-dimensional array of data in an intuitive graphical display, where the graphical display is controlled through a plurality of display interfaces. Specifically, the system acquires data representing a phenomenon such as a plasma, processes that data and displays the data, in real-time, in one of a number of user selectable graphical formats. The data, once acquired, can be further processed by editing, filtering and smoothing. Such processed data can then be "replayed" such that a user can compare various sets of data acquired under various test scenarios. Additionally, the system is used to control and optimize a plasma within plasma generating equipment.

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patent: 5014217 (1991-05-01), Savage
patent: 5347460 (1994-09-01), Gifford et al.
patent: 5548322 (1996-08-01), Gifford
patent: 5658423 (1997-08-01), Angell et al.

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