System and method to measure parameters distribution in...

Details System and method to measure parameters distribution in... System and method to measure parameters distribution in...

2007-04-24

2009-08-04

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

C356S630000

Reexamination Certificate

active

07570373

ABSTRACT:
A measuring device and method are disclosed for parameter distribution measurement over the entire surface of sheet-like objects. The parameters of primary interest are thickness and permeability profiles. The device includes a parameter measuring unit a coordinate measuring unit and a synchronization unit to control operation of the parameter measuring unit and the coordinate measuring unit. The coordinate measuring unit determines the measuring device position on two-dimensional surface using image correlation analysis. The measuring device further comprises a platform for its movement in the plane of the sheet-like object.

REFERENCES:
patent: 5499098 (1996-03-01), Ogawa
patent: 6714310 (2004-03-01), Tanaka et al.
patent: 7457478 (2008-11-01), Aoyama et al.

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