System and method of applying xenon arc-lamps to provide 193...

Details System and method of applying xenon arc-lamps to provide 193... System and method of applying xenon arc-lamps to provide 193...

2006-08-03

2009-02-10

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07489400

ABSTRACT:
Application of Xenon arc-lamps to provide UV/deep UV wavelengths in spectrophotometer, reflectometer, ellipsometer, polarimeter or the like systems.

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