Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-04-18
2010-11-09
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Methods
Reexamination Certificate
active
07830497
ABSTRACT:
Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
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Alikhan Abdullah
del Puerto Santiago
Feroce Jonathan H.
Kish Duane P.
Loopstra Erik R.
ASML Holding N.V.
Kim Peter B
Sterne Kessler Goldstein & Fox P.L.L.C.
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