Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2007-12-18
2007-12-18
Dinh, Paul (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000
Reexamination Certificate
active
10928390
ABSTRACT:
Simulated aerial images for an optical system are made by forming a reference aerial image of a first mask used in connection with the optical system, and then capturing and processing the reference aerial image to generate a set of expansion functions representative of the optical system. The expansion functions account for aberrations and misalignment of the optical system, as well as any aberrations or other defects of a camera therein. The expansion functions are then used to compute simulated aerial images of other masks projected by the optical system. Thus, the expansion functions implicitly represent a calibration of the optical system for purposes of aerial image simulation, obviating the need for direct measurement of the actual aberrations and misalignment. Hence, a simulated aerial image of a second mask for the optical system can be computed by applying the expansion functions to a design of the second mask.
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Applied Materials Israel, Ltd.
Dinh Paul
Tarek N. Fahmi
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