Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate
2006-10-24
2006-10-24
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
C250S2140RC
Reexamination Certificate
active
07126100
ABSTRACT:
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
REFERENCES:
patent: 4989060 (1991-01-01), Usui
Armstrong J. Joseph
Brown David Lee
Chuang Yung-Ho
Tsai Bin-Ming Benjamin
KLA-Tencor Technologies Corporation
Le Que T.
Smyrski Law Group, A.P.C.
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