System and method for semiconductor manufacturing automation

Details System and method for semiconductor manufacturing automation System and method for semiconductor manufacturing automation

2007-09-04

2007-09-04

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S090000, C700S100000

Reexamination Certificate

active

10934171

ABSTRACT:
The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequence; and issuing a warning, if the scheduled sequence does not match the performed sequence.

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