Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-09-11
2007-09-11
Cabrera, Zoila (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000
Reexamination Certificate
active
10796646
ABSTRACT:
A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.
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Chang Ko-Pin
Liu Hui-Tang
Shih Jui-An
Cabrera Zoila
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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