System and method for removing charges with enhanced efficiency

Details System and method for removing charges with enhanced efficiency System and method for removing charges with enhanced efficiency

2007-11-13

2007-11-13

Everhart, Caridad M. (Department: 2891)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

C257SE21328, C257SE21529, C438S798000

Reexamination Certificate

active

11035048

ABSTRACT:
Method and apparatus for removing and neutralizing charges. The method includes loading a structure into a chamber. The structure includes a first surface and a plurality of charges away from the first surface. Additionally, the method includes supplying a first ionized gas to the first surface of the structure, and radiating the structure with a first ultraviolate light. The supplying a first ionized gas and the radiating the structure with a first ultraviolate light are performed simultaneously for a first period of time.

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