Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-10-15
2010-10-05
Tsai, H. Jey (Department: 2895)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S359000, C257S379000, C257SE27047
Reexamination Certificate
active
07808048
ABSTRACT:
A buried thin film resistor having end caps defined by a dielectric mask is disclosed. A thin film resistor is formed on an integrated circuit substrate. A resistor protect layer is formed over the thin film resistor. A layer of dielectric material is formed over the resistor protect layer. The dielectric material is masked and dry etched to leave a first portion of dielectric material over a first end of the thin film resistor and a second portion of dielectric material over a second end of the thin film resistor. The resistor protect layer is then wet etched using the first and second portions of the dielectric material as a hard mask. Then a second dielectric layer is deposited and vias are etched down to the underlying portions of the resistor protect layer.
REFERENCES:
patent: 5547896 (1996-08-01), Lin et al.
patent: 6097095 (2000-08-01), Chung
patent: 6117789 (2000-09-01), Lee
patent: 6279585 (2001-08-01), Shiraki et al.
patent: 6326256 (2001-12-01), Bailey et al.
patent: 6365480 (2002-04-01), Huppert et al.
patent: 6645821 (2003-11-01), Bailey et al.
patent: 7410879 (2008-08-01), Hill et al.
patent: 2002/0102806 (2002-08-01), Bailey et al.
patent: 2004/0140508 (2004-07-01), Sengoku et al.
Rodney Hill, et al., “System and Method for Providing a Dual Via Architecture for Thin Film Resistors”, U.S. Appl. No. 12/217,877, filed Jul. 9, 2008.
Bold Tom
Coppock William Max
Foote, Jr. Richard W.
Hill Rodney
Lines Terry L.
National Semiconductor Corporation
Tsai H. Jey
LandOfFree
System and method for providing a buried thin film resistor... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for providing a buried thin film resistor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for providing a buried thin film resistor... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4209535