Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2005-10-21
2009-12-15
Louie, Wai-Sing (Department: 2814)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S238000, C438S239000, C438S393000, C438S396000, C257S040000, C257SE27016
Reexamination Certificate
active
07632706
ABSTRACT:
A system and method are disclosed for processing an organic memory cell. An exemplary system can employ an enclosed processing chamber, a passive layer formation component operative to form a passive layer on a first electrode, and an organic semiconductor layer formation component operative to form an organic semiconductor layer on the passive layer. A wafer substrate is not needed to transfer from a passive layer formation system to an organic semiconductor layer formation system. The passive layer is not exposed to air after formation of the passive layer and before formation of the organic semiconductor layer. As a result, conductive impurities caused by the exposure to air do not occur in the thin film layer, thus improving productivity, quality, and reliability of organic memory devices. The system can further employ a second electrode formation component operative to form a second electrode on the organic semiconductor layer.
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Kingsborough Richard P.
Leonard William G.
Ngo Minh Van
Pangrle Suzette K.
Sokolik Igor
Louie Wai-Sing
Spansion LLC
Turocy & Watson LLP
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