Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-04-25
2006-04-25
Kosowski, Alexander J (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S099000, C438S005000
Reexamination Certificate
active
07035705
ABSTRACT:
Provided are a system and method for preventing contamination in a semiconductor manufacturing environment. The method includes comparing one or more attributes associated with a product, such as a substrate, with one or more attributes associated with an operation. If the comparison indicates that the product is not compatible with the operation, then the operation is suspended with respect to the product. If the comparison indicates that the product is compatible with the operation, then the operation is performed on the product.
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Hsu Chih-Wei
Hsu Kuang-Huan
Lin Chen-Yung
Lin Chun-Hung
Lin Shui-Tien
Haynes and Boone LLP
Kosowski Alexander J
Taiwan Semiconductor Manufacturing Company , Ltd.
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