System and method for point of use delivery, control and...

Details System and method for point of use delivery, control and... System and method for point of use delivery, control and...

2006-05-30

2006-05-30

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Nonreactive mixing process

C700S266000, C700S285000

Reexamination Certificate

active

07054719

ABSTRACT:
A method of mixing two or more chemicals such as for a CMP system. The method includes delivering a first chemical to a first inlet port of a point of use mixer at a first flow rate, delivering a second chemical to a second inlet port of the point of use mixer at a second flow rate, controlling the flow of the first and second chemicals into the mixer upon demand for a mixture of the first and second chemicals and balancing the flow of the first and second chemicals into the mixer. The mixture can also be output such as to a CMP process. A system for mixing two or more chemicals is also described.

REFERENCES:
patent: 4781467 (1988-11-01), Williams
patent: 6089242 (2000-07-01), Buck
patent: 6675840 (2004-01-01), Jungmann et al.

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