Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2007-12-04
2007-12-04
Duda, Kathleen (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S313000
Reexamination Certificate
active
10313309
ABSTRACT:
A micro-fabricated structure and method of forming a micro-fabricated structure are disclosed. The method includes the steps of forming a first pattern in a first photo-resist, transferring the first pattern in the first photo-resist to a mask layer, forming a second pattern in a second photo-resist, and transferring the second pattern in the second photo-resist to the mask layer. In various embodiments, the method may further include the steps of forming a first pattern in a first photo-resist, forming a second pattern in a second photo-resist, and transferring the first and second patterns to a target layer.
REFERENCES:
patent: 4496419 (1985-01-01), Nulman et al.
patent: 6472317 (2002-10-01), Wang et al.
patent: 6605541 (2003-08-01), Yu
patent: 09-213606 (1997-08-01), None
Ross Caroline A.
Savas Timothy A.
Smith Henry I.
Vogeli Bernhard
Duda Kathleen
Gauthier & Connors LLP
Massachusetts Institute of Technology
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