Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate
2008-03-14
2010-06-01
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
C374S132000, C374S147000, C374S208000, C374S121000, C374S131000
Reexamination Certificate
active
07726876
ABSTRACT:
Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
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Clarke Michael
Laverdiere Marc
Maenke Dale
McLoughlin Robert F.
Wilkinson Wiley James
Entegris, Inc.
Jagan Mirellys
Sprinkle IP Law Group
Verbitsky Gail
LandOfFree
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