System and method for multi-project wafer shuttle service

Details System and method for multi-project wafer shuttle service System and method for multi-project wafer shuttle service

2006-07-04

2006-07-04

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C700S121000

Reexamination Certificate

active

07073160

ABSTRACT:
A system and method for MPW shuttle service. The system includes at least a first MPW shuttle reserving for a first group of device designs, a second MPW shuttle reserving for a second group of device designs, and a checking unit. The checking unit determines whether mask data for the first group has been provided by a cut off date for the first MPW shuttle, and exchanges a first target device design from the first group with a second target device design from the second group if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.

REFERENCES:
patent: 2006/0026549 (2006-02-01), Tsao et al.

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