Drying and gas or vapor contact with solids – Apparatus – With automatic control
Reexamination Certificate
2006-02-28
2006-02-28
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
With automatic control
C034S568000, C034S570000, C034S079000, C134S095200
Reexamination Certificate
active
07003899
ABSTRACT:
A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.
REFERENCES:
patent: 3931684 (1976-01-01), Turnbull et al.
patent: 4838289 (1989-06-01), Kottman et al.
patent: 5271774 (1993-12-01), Leenaars et al.
patent: 5705223 (1998-01-01), Bunkofske
patent: 5945351 (1999-08-01), Mathuni
patent: 5997653 (1999-12-01), Yamasaka
patent: 6230722 (2001-05-01), Mitsumori et al.
patent: 6398975 (2002-06-01), Mertens et al.
patent: 6491764 (2002-12-01), Mertens et al.
patent: 6890245 (2005-05-01), Kistler
patent: 02280330 (1990-11-01), None
patent: 02309638 (1990-12-01), None
patent: 11350169 (1999-12-01), None
patent: WO 02/32825 (2002-04-01), None
de Larios John
Garcia James P.
Redeker Fred C.
Gravini S.
Lam Research Corporation
Martine Penilla and Gencarella LLP
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