Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2005-10-18
2005-10-18
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
Reexamination Certificate
active
06956660
ABSTRACT:
A system and method for measuring a phase difference between first and second reflected polarized light signal components, including transmitting a first incident light signal toward a first object, wherein the first object is a magnetic disk and/or a glass substrate. Seperating from a reflected light signal, a first mixed reflected polarized light signal component having a first phase and a second mixed reflected polarized light signal component having a second phase that is different from said first phase, wherein said mixed reflected polarized light signal components comprises both P-polarized and S-polarized light relative to a plane of incidence of said reflected light signal. Detecting the intensities of said first and second mixed reflected polarized light signal components, and determining a difference in phase between said first and second mixed reflected polarized light signal component based upon said first and second intensities.
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Kudinar Rusmin
Meeks Steven W.
Fenwick & West LLP
KLA-Tencor Technologies
Nguyen Tu T.
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