Optics: measuring and testing – Surface roughness
Reexamination Certificate
2005-10-18
2005-10-18
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
Surface roughness
Reexamination Certificate
active
06956658
ABSTRACT:
A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film magnetic disks and silicon wafers at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat is provided. The system and method involve a focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. This generates both reflected and scattered light that may be measured to determine various values and properties related to the surface of the disk, including identifying the Kerr-effect in reflected light for determination of point magnetic properties. In addition, the present invention can mark the position of an identified defect.
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Kudinar Rusmin
Meeks Steven W.
Fenwick & West LLP
KLA-Tencor Technologies Corporation
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