Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-10-16
2007-10-16
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S071000, C356S400000
Reexamination Certificate
active
10623004
ABSTRACT:
A measurement system (222) for measuring the position of a stage (248) along a first axis includes a first system (260) having a first beam source (260A) that directs a first beam (260H) on a first path that is parallel with a second axis and a first redirector (260D) that redirects the first beam so that the redirected first beam (260H) is on a first redirected path that is parallel with the first axis irrespective to the orientation of the first redirector (260D) about a third axis. The measurement system (222) can include a shield (380) that protects the first beam (260H) from environmental conditions.
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Melles Griot Catalog p. 10-9. The Applicants do not know the exact date of the catalog. However, the Applicants believe that the catalog is at least one year old.
Hidaka Yasuhiro
Kamiya Saburo
Kawaguchi Toru
Kho Leonard Wai Fung
Poon Alex Ka Tim
Nikon Corporation
Roeder Steven G.
Rutledge D.
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