Optics: measuring and testing – Dimension
Reexamination Certificate
2008-05-06
2008-05-06
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Dimension
C356S630000, C356S329000, C356S432000, C438S710000, C250S559190
Reexamination Certificate
active
07369254
ABSTRACT:
A system for measuring dimension of photomasks comprises a light source emitting measuring light having a wavelength, a transmission detector for receiving the measuring light, a stage on which a photomask having circuit patterns is placed, the stage being disposed between the light source and the transmission detector, and a controller having a dimension-deciding algorithm to determine a dimension of the circuit patterns from a spectroscopic characteristic of the received measuring light, the controller being connected to the transmission detector.
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Choi Seong-Woon
Kim Byung-Gook
Lee Dong-Gun
Moon Seong-yong
Yu Sang-Yong
F. Chau & Associates LLC
Lauchman Layla G.
Samsung Electronics Co,. Ltd.
Slomski Rebecca C
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