Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2011-08-16
2011-08-16
Huff, Mark F (Department: 1721)
Photocopying
Projection printing and copying cameras
With developing
C355S072000, C396S611000
Reexamination Certificate
active
07999910
ABSTRACT:
The present disclosure provides a system and method for manufacturing a mask for semiconductor processing. In one example, the system includes at least one exposure unit configured to select a recipe for a later baking process in a post treatment unit, a buffer unit coupled to the exposure unit and configured to move the mask substrate from the exposure unit to the post treatment unit without exposing the mask substrate to the environment; and the post treatment unit coupled to the buffer unit and the exposure unit and configured to perform a baking process on the mask substrate using baking parameters associated with the recipe selected by the exposure unit.
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Chen Chia-Jen
Chin Sheng-Chi
Hsieh Hung Chang
Lee Hsin-Chang
Lin Burn Jeng
Fraser Stewart A
Haynes and Boone LLP
Huff Mark F
Taiwan Semiconductor Manufacturing Company , Ltd.
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