Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2007-11-20
2007-11-20
Estrada, Michelle (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
C977S844000, C977S880000, C118S7230AN
Reexamination Certificate
active
11123884
ABSTRACT:
A system and method for making nanoparticles. The system includes a first cathode including a first metal tube associated with a first end and a second end, a first anode including a second metal tube associated with a third end and a fourth end, and a first container including a first gas inlet. The first end and the third end are located inside the first container. The first end and the third end are separated by a first gap, the first metal tube is configured to allow a first gas to flow from the second end to the first end, and the first container is configured to allow a second gas to flow from the first gas inlet into the second metal tube through at least a first part of the first gap.
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Flagan Richard C.
Giapis Konstantinos P.
Holunga Dean
Sankaran R. Mohan
California Institute of Technology
Estrada Michelle
Stark Jarrett J
Townsend and Townsend / and Crew LLP
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