System and method for making a LDMOS device with...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S343000, C257S355000, C257SE29256, C257SE29258

Reexamination Certificate

active

07414287

ABSTRACT:
A semiconductor device includes one or more LDMOS transistors and one of more SCR-LDMOS transistors. Each LDMOS transistor includes a LDMOS well of a first conductivity type, a LDMOS source region of a second conductivity type formed in the LDMOS well, and a LDMOS drain region of a second conductivity type separated from the LDMOS well by a LDMOS drift region of the second conductivity type. Each SCR-LDMOS transistor comprising a SCR-LDMOS well of the first conductivity type, a SCR-LDMOS source region of the second conductivity type formed in the SCR-LDMOS well, a SCR-LDMOS drain region of a second conductivity type, and a anode region of the first conductivity type between the SCR-LDMOS drain region and the SCR-LDMOS drift region. The anode region is separated from the SCR-LDMOS well by a SCR-LDMOS drift region of the second conductivity type.

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S.M. Sze, “Thyristors” from Physics of Semiconductor Devices (second edition), 1981, John Wiley and Sons, pp. 191-193.
Lee et al., “Novel ESD Protection Structure with Embedded SCR LDMOS for Smart Power Technology,” from 2002 IEEE International Reliability Physics Symposium Proceedings on Apr. 7-11, 2002, pp. 156-161. (IEEE Catalog No. 02CH37320).
S.M. Sze, “Thyristors” from Physics of Semiconductor Devices (second edition), 1981, John Wiley and Sons, pp. 191-193.

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