System and method for in-situ flow verification and calibration

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C702S100000, C073S001340

Reexamination Certificate

active

06955072

ABSTRACT:
A system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control devices to a flow verification device. A controller of the flow verification device is programmed to communicate with each of the flow control devices through the first network physical layer, receive gas specific information and a transfer function from each of the flow control devices, and verify the flow of each flow control device. The controller of the flow verification device is further programmed to communicate with each of the flow control devices through the first network physical layer and, if necessary, calibrate the flow control devices. The verification and calibration of the flow control devices is preferably carried out based upon a single command provided through a tool controller connected to a second network physical layer connected to the flow control devices.

REFERENCES:
patent: 4328697 (1982-05-01), Tumber et al.
patent: 4331262 (1982-05-01), Snyder et al.
patent: 5479812 (1996-01-01), Juntunen et al.
patent: 5726358 (1998-03-01), Kolling
patent: 5745390 (1998-04-01), Daneshgari
patent: 5856929 (1999-01-01), McClendon et al.
patent: 6671583 (2003-12-01), Varone et al.
patent: 6712084 (2004-03-01), Shajii et al.
patent: 6832166 (2004-12-01), Schutzbach
patent: 2003/0055589 (2003-03-01), Mogadam
patent: 2004/0200260 (2004-10-01), Klosterman et al.
DeviceNet™ Technical Overview, Copyright 2001, Open DeviceNet, Vendor Association, Inc. (ODVA), pp X-XIV, month not given.
Tru-Flo™ Mass Flow Verifier Model GBR3A, Bulletin Tru-Flo-May 2001, © 2001 MKS Instruments, Inc., 4 pages.
DeviceNet ™ MFCs, Bulletin DNetMCFCs-Sep. 2002, © 2002 MKS Instruments, Inc., 4 pages.
Gas Box Rate-Of-Rise In Situ Flow Verifier The GBROR™, Bulletin GBROR-Aug. 1999, © 1999 MKS Instruments, Inc., pp. 1-6.
Calibration for Accuracy & Repeatability, Calibration & Service Line Card -Mar. 2003, © 2003 MKS Instruments, Inc., 6 pages.
Blue Box Communications Manager, Bulletin BlueBoxComm--Apr. 2003, © 2003 MKS Instruments, Inc., 4 pages.
International Search Report PCT/04/16142 mailed Jun. 3, 2005.
Written Opinion PCT/US04/16142 mailed Jun. 3, 2005.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

System and method for in-situ flow verification and calibration does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for in-situ flow verification and calibration, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for in-situ flow verification and calibration will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3438762

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.