Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1995-04-14
1998-05-26
Font, Frank G.
Optics: measuring and testing
By polarized light examination
Of surface reflection
356365, 356367, 250225, G01N 2121
Patent
active
057574944
ABSTRACT:
The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.
REFERENCES:
patent: 3741661 (1973-06-01), Yamamoto et al.
patent: 3880524 (1975-04-01), Dill et al.
patent: 4053232 (1977-10-01), Dill et al.
patent: 4176951 (1979-12-01), Robert et al.
patent: 4198261 (1980-04-01), Busta et al.
patent: 4208240 (1980-06-01), Latos
patent: 4407709 (1983-10-01), Enjouji et al.
patent: 4408884 (1983-10-01), Hleinknecht et al.
patent: 4758304 (1988-07-01), McNeil et al.
patent: 5057781 (1991-10-01), Atkins et al.
patent: 5076696 (1991-12-01), Cohn et al.
patent: 5091320 (1992-02-01), Aspnes et al.
patent: 5166080 (1992-11-01), Schietinger et al.
patent: 5181080 (1993-01-01), Fanton et al.
patent: 5276503 (1994-01-01), Hayashi et al.
patent: 5311285 (1994-05-01), Oshige et al.
patent: 5313044 (1994-05-01), Massoud et al.
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5335066 (1994-08-01), Yanada et al.
patent: 5336385 (1994-08-01), Shimose et al.
patent: 5373359 (1994-12-01), Wollam et al.
patent: 5504582 (1996-04-01), Johs et al.
Optics, Hecht, Addison-Wesley Publishing pp. 304-305, pp. 316-323.
Photonics Design & Applications Handbook, 39th Ed, 1993 pp. H-412-H-415.
Design and Operation of ETA, an Automated Ellipornetes.
Havge & Dill, IBM J. of Research and Development, vol. 17, No. 6 pp. 471-554 Nov. 1973.
Regression Calibration Method for Rotating Element Elliprometer, Johs, Thin Solid Films, 234 (1993) pp. 395-398.
Meadowlark Optics Catalog Sheets Liquid Crsytal Retarder & p. 2, 3, 4, 5, 8 & 9.
Optics Girdes, Melles-Griot Catalog Sheets pp. 14-28-14-34.
Ellipsometry & Polarized Light, Azzan & Basheva, North-Holland pp. 152-181, pp. 245-267, pp. 399-416, pp. 370-373, pp. 405-416.
Recent Developments in Instrumentation in Elliprometry, Hague, Surface Science, vol. 96, 108, 140 (1980).
Automatic Rotating Element Ellipsonmeter: Calibration, Operation, and Real-time applications, Rev. Sci, Instrum. 61(8), Aug. 1990.
The Bereh Polarization Compensator, Model 5540 version Manual, New Fows Inc, Publication.
Green Steven E.
Herzinger Craig M.
Johs Blaine D.
Woollam John A.
Font Frank G.
J.A. Woollam Co. Inc.
Smith Zandra V.
Welch James D.
LandOfFree
System and method for improving data acquisition capability in s does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for improving data acquisition capability in s, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for improving data acquisition capability in s will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1968792