Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2007-01-09
2007-01-09
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S001000, C430S002000
Reexamination Certificate
active
10677804
ABSTRACT:
A method is disclosed for forming an array of focusing elements for use in a lithography system. In accordance with an embodiment, the method includes the steps of providing a master element that includes at least one diffractive pattern at a first location with respect to a target surface, illuminating the master element to produce a first diffractive pattern on the target surface at the first location, moving the master element with respect to the target surface to a second location with respect to the target surface, and illuminating the master element to produce a second diffractive pattern on the target surface at the second location.
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patent: 0 737 902 (1996-10-01), None
“Fabrication of holographic microlenses using a deep UV lithographed zone plate,” Ming et al.Applied Optics. Dec. 1990. vol. 29, No. 34.
“Fabrication of diffractive optical elements using a single optical exposure with a gray level mask,” Daschner et al.J. Vac. Sci. Technol. B., Nov./Dec. 1995, vol. 13.
Barbastathis George
Carter David J.
Gil Dario
Menon Rajesh
Smith Henry I.
Gauthier & Connors LLP
Massachusetts Institute of Technology
McPherson John A.
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