Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2004-04-21
2008-12-30
Hendricks, Keith D. (Department: 1794)
Stock material or miscellaneous articles
Composite
Of silicon containing
Reexamination Certificate
active
07470470
ABSTRACT:
The present invention provides systems and methods for mixing precursors such that a mixture of precursors are present together in a chamber during a single pulse step in an atomic layer deposition (ALD) process to form a multi-component film. The precursors are comprised of at least one different chemical component, and such different components will form a mono-layer to produce a multi-component film. In a further aspect of the present invention, a dielectric film having a composition gradient is provided.
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Park Seung Gyun
Senzaki Yoshihide
Aviza Technology Inc.
Hendricks Keith D.
Miller Daniel
Morgan & Lewis & Bockius, LLP
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