Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2005-09-19
2009-10-27
Bahta, Kidest (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C137S487500
Reexamination Certificate
active
07610117
ABSTRACT:
One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
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Brodeur Craig L.
Laverdiere Marc
McLoughlin Robert F.
Niermeyer J. Karl
Shyu Jieh-Hwa
Bahta Kidest
Entegris, Inc.
Sprinkle IP Law Group
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