System and method for fast focal length alterations

Details System and method for fast focal length alterations System and method for fast focal length alterations

2007-01-09

2007-01-09

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C315S111610

Reexamination Certificate

active

10492393

ABSTRACT:
An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam.

REFERENCES:
patent: 4438336 (1984-03-01), Riecke
patent: 4766314 (1988-08-01), Jung
patent: 5089699 (1992-02-01), Ose et al.

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