Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2007-05-08
2007-05-08
Siek, Vuthe (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C250S311000
Reexamination Certificate
active
10648231
ABSTRACT:
In order to realize a means for acquiring three-dimensional shape information about patterns by nondestruction and evaluate a relationship between the three-dimensional shape information about these patterns and device properties, a semiconductor device pattern evaluating system is provided with a feature index calculating means for quantifying a property of a three-dimensional shape of a pattern to be evaluated, as feature index, a database that records therein a relationship between the feature index of each three-dimensional pattern shape and a device property of a circuit containing patterns each having the feature index, and a device property estimating means for estimating a property of a device circuit formed by the pattern to be evaluated, on the basis of the feature index of the three-dimensional pattern shape, which have been quantified by the feature index calculating means, and the information recorded in the database.
REFERENCES:
patent: 5900633 (1999-05-01), Solomon et al.
patent: 6175947 (2001-01-01), Ponnapalli et al.
patent: 2003/0015660 (2003-01-01), Shishido et al.
Nakagaki Ryo
Shishido Chie
Takagi Yuji
Tanaka Maki
Antonelli, Terry Stout & Kraus, LLP.
Dimyan Magid Y
Hitachi High-Technologies Corporation
Siek Vuthe
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