System and method for directing electromagnetic beams

Details System and method for directing electromagnetic beams System and method for directing electromagnetic beams

1998-10-19

1999-07-27

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356382, G01B 1100

Patent

active

059299959

ABSTRACT:
Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a spectroscopic beam of electromagnetic radiation while maintaining significant sensitivity of both (PSI) and (DELTA) ellipsometric parameters to changes in surfaces of monitored sample systems, while minimizing sensitivity to changes in electromagnetic beam directing means orientation.

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