Measuring and testing – Testing of apparatus
Reexamination Certificate
2006-10-03
2006-10-03
Noland, Thomas P. (Department: 2856)
Measuring and testing
Testing of apparatus
C029S025010, C137S455000
Reexamination Certificate
active
07114404
ABSTRACT:
Systems and methods are provided for detecting flow in a mass flow controller (MFC). The position of a gate in the MFC is sensed or otherwise determined to monitor flow through the MFC and to immediately or nearly immediately detect a flow failure. In one embodiment of the present invention, a novel MFC is provided. The MFC includes an orifice, a mass flow control gate, an actuator and a gate position sensor. The actuator moves the control gate to control flow through the orifice. The gate position sensor determines the gate position and/or gate movement to monitor flow and immediately or nearly immediately detect a flow failure. According to one embodiment of the present invention, the gate position sensor includes a transmitter for transmitting a signal and a receiver for receiving the signal such that the receiver provides an indication of the position of the gate based on the signal received. Other embodiments of the gate position sensor are described herein, as well as systems and methods that incorporate the novel MFC within a semiconductor manufacturing process.
REFERENCES:
patent: 1877810 (1932-09-01), Chamberlain
patent: 3338256 (1967-08-01), Panissidi
patent: 3348559 (1967-10-01), Brothman et al.
patent: 3354655 (1967-11-01), Armond
patent: 4233157 (1980-11-01), Miller
patent: 4297898 (1981-11-01), Herzi
patent: 4308754 (1982-01-01), Pedersen et al.
patent: 4397193 (1983-08-01), Ryan et al.
patent: 4413531 (1983-11-01), Karplus et al.
patent: 4480485 (1984-11-01), Bradshaw et al.
patent: 4488428 (1984-12-01), Taniuchi
patent: 4502318 (1985-03-01), Converse, III et al.
patent: 4553846 (1985-11-01), Hilton et al.
patent: 4567776 (1986-02-01), Adachi
patent: 4597048 (1986-06-01), Mazur et al.
patent: 4613818 (1986-09-01), Battocletti et al.
patent: 4672997 (1987-06-01), Landis et al.
patent: 4674279 (1987-06-01), Ali et al.
patent: 4687020 (1987-08-01), Doyle
patent: 4804638 (1989-02-01), Hoke et al.
patent: 4924710 (1990-05-01), Inada et al.
patent: 5040046 (1991-08-01), Chhabra et al.
patent: 5040415 (1991-08-01), Barkhoudarian
patent: 5055026 (1991-10-01), Gordon
patent: 5238392 (1993-08-01), Hosokawa et al.
patent: 5373737 (1994-12-01), Hwang
patent: 5385056 (1995-01-01), Marsh et al.
patent: 5503035 (1996-04-01), Itoh et al.
patent: 5658423 (1997-08-01), Angell et al.
patent: 5668327 (1997-09-01), Amemori et al.
patent: 5728947 (1998-03-01), Marsh et al.
patent: 5736649 (1998-04-01), Kawasaki et al.
patent: 5747701 (1998-05-01), Marsh et al.
patent: 5801315 (1998-09-01), Park et al.
patent: 5841035 (1998-11-01), Andoh et al.
patent: 5844137 (1998-12-01), Carson
patent: 5904799 (1999-05-01), Donohoe
patent: 6077357 (2000-06-01), Rossman et al.
patent: 6119710 (2000-09-01), Brown
patent: 6170492 (2001-01-01), Ueda et al.
patent: 6206340 (2001-03-01), Paese et al.
patent: 6216726 (2001-04-01), Brown et al.
patent: 6276047 (2001-08-01), Webster et al.
patent: 6290806 (2001-09-01), Donohoe
patent: 6321765 (2001-11-01), Gill
patent: 6325017 (2001-12-01), DeBoer et al.
patent: 6343617 (2002-02-01), Tinsley et al.
patent: 6358327 (2002-03-01), Pakharna et al.
patent: 6368398 (2002-04-01), Vaartstra
patent: 6378357 (2002-04-01), Han et al.
patent: 6413358 (2002-07-01), Donohoe
patent: 6427718 (2002-08-01), Stringam et al.
patent: 6429120 (2002-08-01), Ahn et al.
patent: 6447674 (2002-09-01), Simon et al.
patent: 6461982 (2002-10-01), DeBoer et al.
patent: 6500300 (2002-12-01), Donohoe
patent: 6502458 (2003-01-01), Kruger et al.
patent: 6609419 (2003-08-01), Bankart et al.
patent: 6807875 (2004-10-01), Lebrun et al.
patent: 7055539 (2006-06-01), Suzuki
patent: 2001/0009404 (2001-07-01), Paese et al.
patent: 2001/0052261 (2001-12-01), Lull et al.
patent: 2002/0189947 (2002-12-01), Paul et al.
patent: 2002/0198668 (2002-12-01), Lull et al.
patent: 2003/0033867 (2003-02-01), Posey et al.
patent: 56003365 (1981-01-01), None
patent: 57144373 (1982-09-01), None
patent: 05002429 (1993-01-01), None
patent: WO 8903104 (1989-04-01), None
Mardian Allen P.
Rueger Neal R.
Sandhu Gurtej Singh
Sharan Sujit
Noland Thomas P.
Schwegman Lundberg Woessner & Kluth P.A.
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