Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing gas sample
Reexamination Certificate
2011-03-01
2011-03-01
Warden, Jill (Department: 1773)
Chemical apparatus and process disinfecting, deodorizing, preser
Analyzer, structured indicator, or manipulative laboratory...
Means for analyzing gas sample
C436S181000, C355S051000, C355S053000, C355S030000
Reexamination Certificate
active
07897110
ABSTRACT:
A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.
REFERENCES:
patent: 6694284 (2004-02-01), Nikoonahad et al.
patent: 2002/0083409 (2002-06-01), Hamm
patent: 2003/0031589 (2003-02-01), Martin et al.
patent: 1 452 851 (2004-09-01), None
patent: 2360583 (2001-09-01), None
Bakker Levinus Pieter
Banine Vadim Yevgenyevich
Kurt Ralph
Moors Johannes Hubertus Josephina
Stevens Lucas Henricus Johannes
ASML Netherlands B.V.
Sakelaris Sally A
Sterne, Kessler, Goldstein & Fox P.L.L.C
Warden Jill
LandOfFree
System and method for detecting at least one contamination... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for detecting at least one contamination..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for detecting at least one contamination... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2738234