Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-10-23
2007-10-23
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C705S022000, C705S075000, C705S404000, C707S793000
Reexamination Certificate
active
11370649
ABSTRACT:
A system comprises a parser operable to receive a log file containing detailed processing tool transactional data and generate an operation journal containing a subset of the detailed processing tool transactional data arranged in a known format, a comparator operable to receive automated material tracking data, and compare with the operation journal data, and an automatic correction module operable to automatically correct the automated material tracking data in response to a discrepancy between the automated material tracking data and the operation journal data.
REFERENCES:
patent: 6381509 (2002-04-01), Thiel et al.
patent: 6985786 (2006-01-01), Wright
patent: 2007/0005173 (2007-01-01), Kanitz et al.
Kuhl, Michael E., et al., “Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs”, Proceedings of the 2004 Winter Simulation Conference, pp. 1962-1966.
Chung Yung-Cheng
Fu Hsieh-Shyh
Haynes and Boone LLP
Picard Leo
Rao Sheela
Taiwan Semiconductor Manufacturing Company , Ltd.
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