System and method for correcting material and data mismatch...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C705S022000, C705S075000, C705S404000, C707S793000

Reexamination Certificate

active

11370649

ABSTRACT:
A system comprises a parser operable to receive a log file containing detailed processing tool transactional data and generate an operation journal containing a subset of the detailed processing tool transactional data arranged in a known format, a comparator operable to receive automated material tracking data, and compare with the operation journal data, and an automatic correction module operable to automatically correct the automated material tracking data in response to a discrepancy between the automated material tracking data and the operation journal data.

REFERENCES:
patent: 6381509 (2002-04-01), Thiel et al.
patent: 6985786 (2006-01-01), Wright
patent: 2007/0005173 (2007-01-01), Kanitz et al.
Kuhl, Michael E., et al., “Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs”, Proceedings of the 2004 Winter Simulation Conference, pp. 1962-1966.

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