Boots – shoes – and leggings
Patent
1997-03-04
1999-06-22
Barlow, John
Boots, shoes, and leggings
702182, G06F 1900
Patent
active
059148799
ABSTRACT:
A system and method for calculating the performance of a cluster tool using a weighted configuration matrix. The system includes a computer system which maintains a database of entities corresponding to semiconductor wafer processing modules in a fab. A user "clusters" the entities, i.e., selects entities to reflect the relationship of the constituent modules physically linked together which form the cluster tool. The user also designates a main module against which the main performance events of the cluster tool, such as begin run and end run, are logged in the database. The computer system configures all of the "up" and "down" state configuration combinations of the cluster tool modules and displays the configurations for the user. The user specifies a weight for each of the configurations based upon an estimate of the performance the cluster tool while in the respective configuration relative to the performance of the cluster tool in a fully operable configuration. For example, the user may choose the weights based upon the throughput of wafers capable of being processed by the cluster tool in each of the respective configurations, the number of wafer processes capable of being performed by the cluster tool in each of the respective configurations, or the economic value added (EVA) by the wafer processes capable of being performed by the cluster tool in each of the respective configurations. The computer system compiles the configurations and received weights into a weighted configuration matrix which is used to calculate the performance of the cluster tool. In particular, the E10 metrics and OEE metric components are calculated as a measure of the reliability, availability, maintainability, operational efficiency and utilization aspects of performance of the cluster tool over a total period of time. Formulas for calculating various of the metrics using the configuration matrix are provided. The method is applicable to both sequential and parallel type cluster tools and does not require additional data tracking beyond currently tracked data.
REFERENCES:
patent: 5241465 (1993-08-01), Oba et al.
patent: 5408405 (1995-04-01), Mozumder et al.
patent: 5444632 (1995-08-01), Kline et al.
patent: 5659593 (1997-08-01), Tzvieli
patent: 5719796 (1998-02-01), Chen
patent: 5740429 (1998-04-01), Wang et al.
patent: 5801945 (1998-09-01), Comer
Auches et al., Managing Multi-chamber Tool Productivity, IEEE/Semi Advanced Semiconductor Manufacturing Conference pp. 240-247, Dec. 1995.
Dhudshra et al., Claster Tool Performance Tracking, Future FAB International pp. 173-175, no date but considered.
Not attributed, SEMI E10-96 Standard for Definition & Measurement of Equipment Reliability, Availability, and Maintainability (RAM), Nov. 28, 1995.
Not attributed, SEMI E10-92 Guideline for Definition and Measurement of Equipment Reliability, Availabitiy, and Maintainabililty (RAM) pp. 67-75, no date but considered.
Unattributed, Process and Hardware Overview, Novellus Systems Inc., no date but considered.
Nakajima, Introduction to Productive Maintenance, Productivity Press, Portland, Oregon, 1988, pp. 12-15 and 21-52.
Christian Craig William
Crowley John B.
Dolman Denver L.
Wang Qingsu
Advanced Micro Devices
Barlow John
Daffer Kevin L.
Kowert Robert C.
Miller Craig Steven
LandOfFree
System and method for calculating cluster tool performance metri does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for calculating cluster tool performance metri, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for calculating cluster tool performance metri will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1712385