System and method for active array temperature sensing and...

Details System and method for active array temperature sensing and... System and method for active array temperature sensing and...

2007-06-19

2007-06-19

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

C438S014000

Reexamination Certificate

active

10950646

ABSTRACT:
A system and method for active array temperature sensing and cooling. The system includes an active temperature sensing layer, a thermoelectric cooling layer and a heatsink layer. The temperature sensing layer is formed of temperature sensing elements that sense the temperature gradient across an unevenly heated region of the active array substrate. The thermoelectric cooling layer controls the temperature gradient sensed by the temperature sensing layer. The heatsink layer includes a plurality of cooling channels for absorbing thermal energy from the unevenly heated region. The system is under the control of a process control computer.

REFERENCES:
patent: 3947952 (1976-04-01), Miller et al.
patent: 5589000 (1996-12-01), Harms et al.
patent: 5701055 (1997-12-01), Nagayama et al.
patent: 6410445 (2002-06-01), Fagerman
patent: 6592933 (2003-07-01), Himeshima et al.
patent: 6610178 (2003-08-01), Kato et al.
patent: 2003/0193285 (2003-10-01), Kim
patent: 2003/0228715 (2003-12-01), Brody et al.

Affiliated with

Also associated with

Rating

System and method for active array temperature sensing and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for active array temperature sensing and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for active array temperature sensing and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3885974