X-ray or gamma ray systems or devices – Specific application – Lithography
Patent
1990-03-19
1992-04-21
Church, Craig E.
X-ray or gamma ray systems or devices
Specific application
Lithography
378 69, 378208, G21K 500
Patent
active
051075245
ABSTRACT:
A synchrotron radiation utilizing apparatus comprises a generator generating synchrotron radiation, a guide duct for outwardly guiding the synchrotron radiation in a predetermined direction, a plurality of supporting members each supporting one of a plurality of objects which are targets to be irradiated with the synchrotron radiation, the supporting members being disposed at positions distant substantially by an equal distance from the center of rotation of the apparatus, a support base rotatably supporting the supporting members, a first rotating unit rotating each of the supporting members in a predetermined direction, a first control unit applying a control signal to the first rotating unit, a second rotating unit rotating the support base in the plane of the support base in a direction opposite to the direction of rotation of the object supporting members, and a second control unit applying a control signal to the second rotating unit.
REFERENCES:
patent: 4028547 (1977-06-01), Eisenberger
patent: 4029967 (1977-06-01), Tetzlaff
patent: 4733087 (1988-03-01), Narita et al.
Kitamura Masashi
Kobayashi Takashi
Maki Naoki
Yamaguchi Kiyoshi
Church Craig E.
Hitachi , Ltd.
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