Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Patent
1996-05-16
2000-10-31
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
117218, 117918, C30B 3500
Patent
active
061396303
ABSTRACT:
A suspender for suspending polycrystalline rods steadfastly and easily in a furnace for single-crystal fabrication by the recharge or additionally charged method is disclosed. The suspender includes a plate which is made of molybdenum or SiC-coated graphite and a stick perpendicularly connected to the center of the plate. Both sides of the openings are arms for supporting the polycrystalline rods, thereby suspending the polycrystalline rods vertically in the opening. Means for preventing the polycrystalline rods from slipping out of the suspender are provided at ends of the arms. Therefore, the polycrystalline rods will not slip from the opening even though the plate is inclined. The suspender is suspended in the furnace by a stick. The polycrystalline rods require few tasks to form grooves and install on the suspender, thus decreasing the process time and manufacturing cost.
REFERENCES:
patent: 3522014 (1970-07-01), Keller
patent: 3953281 (1976-04-01), Pantusco et al.
patent: 5169271 (1992-12-01), Yamashita
patent: 5173270 (1992-12-01), Kida et al.
Fujiyama Tatsuhiro
Inagaki Hiroshi
Kurogi Hidetoshi
Uchiyama Teruhiko
Garrett Felisa
Komatsu Electronic Metals Co. Ltd.
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