Susceptor for radiant absorption heater system

Details Susceptor for radiant absorption heater system Susceptor for radiant absorption heater system

1982-10-06

1985-02-12

Leung, P. H.

Electric heating

Metal heating

Of cylinders

219 1067, 219354, 118725, 118728, 118 501, H05B 610

Patent

active

044993544

ABSTRACT:
A susceptor for use in a chemical vapor deposition process in a radiant absorption heating system comprises a heater adapted to absorb radiant energy and a sheath of high purity quartz completely surrounding the heater. The sheath further comprises dimples inside the sheath spacing the sheath from the heater. The heater may be graphite having a substantially pinhole-free outgas-inhibiting outer-coating such as silicon carbide.

REFERENCES:
patent: 3180917 (1965-04-01), Morrison et al.
patent: 3293074 (1966-12-01), Nickl
patent: 3301213 (1967-01-01), Grochowski et al.
patent: 3665139 (1972-05-01), Steggewentz
patent: 4093201 (1978-06-01), Dietze et al.
patent: 4168998 (1979-09-01), Hasegawa et al.

Affiliated with

Also associated with

Rating

Susceptor for radiant absorption heater system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Susceptor for radiant absorption heater system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Susceptor for radiant absorption heater system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1391237