Surface treatment method, manufacturing method of...

Details Surface treatment method, manufacturing method of... Surface treatment method, manufacturing method of...

2006-08-09

2009-08-25

Cao, Phat X (Department: 2813)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

C438S798000, C257SE21077

Reexamination Certificate

active

07579287

ABSTRACT:
A method for processing an object containing moisture is provided to efficiently remove the moisture and to prevent re-adsorption of the moisture. In particular, the method has a step of removing the moisture contained in the object in an atmosphere containing excited hydrogen, deuterium, deuterated hydrogen, or tritium.

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Official Action dated Nov. 25, 2008 in Japanese Application No. 2006-211055.

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